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0.08-micron features printed on silicon at labs, says Lucent

Anonymous

Electronic News, Jul 15, 1996, p.10

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  • Title:
    0.08-micron features printed on silicon at labs, says Lucent
  • Author/Creator: Anonymous
  • Language: English
  • Is Part Of: Electronic News, Jul 15, 1996, p.10
  • Description: The electron-beam projection lithography system uses a Bell Labs-manufactured silicon nitride mask membrane with a tungsten pattern area, research team director Lloyd Harriott said. In fact, the new type of mask and the idea of using it to do projection...
  • Identifier: ISSN: 10616624